Near field 3D spatial optical field profiles inside a layer of amorphous silicon with nano-holes backed with a metal reflector

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We consider a 200nm thick layer of a-Si backed by a perfect electric conductor. A square periodic array of circular holes are opened in the film with 50% duty cycle. Linearly polarized plane wave of light is normally incident from ambient.

Software Used


REMS is a frequency domain wave optics simulator. REMS solves Maxwell equations in frequency domain for both space and time variables. REMS is a heavily multi-threaded, stable and efficient implementation various formulations of Rigorous Coupled Wave Analysis (RCWA), Fourier Modal Method (FMM), and the S-matrix algorithm.

For more details see REMS .

Model Results

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